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Plasma-surface interactions of advanced photoresist systems
Sebastian Engelmann
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- Editora: Ks Omniscriptum Publishing
- Ano: 2009
- ISBN: 9783639178241
- Plasma-surface interactions of advanced photoresist systems
Descrição: Plasma based transfer of photoresist (PR) patterns using 193nm PR films usually suffer from high removal rates and ... Veja mais